Cleaning and liquid contact with solids – Processes – With work or work parts movable during treatment
Reexamination Certificate
2007-06-05
2007-06-05
Stinson, Frankie L. (Department: 1746)
Cleaning and liquid contact with solids
Processes
With work or work parts movable during treatment
C134S034000, C134S042000, C134S182000
Reexamination Certificate
active
10309832
ABSTRACT:
An inventive vertical spin-dryer is provided. The inventive spin-dryer may have a shield system positioned to receive fluid displaced from a substrate vertically positioned within the spin-dryer. The shield system may have one or more shields positioned to at least partially reflect fluid therefrom as the fluid impacts the shield. The one or more shields are angled to encourage the flow of fluid therealong, and are preferably hydrophilic to prevent droplets from forming. Preferably the shield system has three shields positioned in a horizontally and vertically staggered manner so that fluid is transferred from a substrate facing surface of a first shield to the top or non-substrate-facing surface of an adjacent shield, etc. A pressure gradient may be applied across the interior of the spin-dryer to create an air flow which encourages fluid to travel along the shield system in a desired direction. A sensor adapted to facilitate desired flywheel position, an openable gripper having a remote actuator, a radiused gripper and a source of inert drying gas are also provided in individual embodiments.
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Europena Patent Office 0 795 892 Sep. 1997.
Andeen David G.
Birang Manoocher
Brown Brian J.
Husain Anwar
Inagawa Makoto
Applied Materials Inc.
Dugan and Dugan
Stinson Frankie L.
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