4. Electric heating
  5. Heating devices
  6. Combined with container, enclosure, or support for material...

Dugan and Dugan

Law Firm

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Calibration of high speed loader to substrate transport system

Data processing: generic control systems or specific application – Specific application – apparatus or process – Article handling
Reexamination Certificate

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Chemical dilution system for semiconductor device processing...

Agitating – Having specified feed means – Responsive to condition sensor
Reexamination Certificate

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Heater for use in substrate processing

Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Reexamination Certificate

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Megasonic wafer cleaning tank with reflector for improved...

Cleaning and liquid contact with solids – Apparatus – With movable means to cause fluid motion
Reexamination Certificate

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Method and apparatus for monitoring a process by employing...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With measuring – sensing – detection or process control means
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Profile ID: LFUS-PAI-P-2028839

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