Slurry compositions, methods of preparing slurry...

Details Slurry compositions, methods of preparing slurry... Slurry compositions, methods of preparing slurry...

2011-08-30

2011-08-30

Vinh, Lan (Department: 1713)

Etching a substrate: processes

Nongaseous phase etching of substrate

Using film of etchant between a stationary surface and a...

C216S037000, C216S067000, C216S099000, C216S102000, C438S689000, C438S690000, C438S691000, C438S692000, C051S307000, C051S308000, C051S309000

Reexamination Certificate

active

08007676

ABSTRACT:
A slurry composition includes an acidic aqueous solution and one or both of, an amphoteric surfactant and a glycol compound. Examples of the amphoteric surfactant include a betaine compound and an amino acid compound, and examples of the amino acid compound include lysine, proline and arginine. Examples of the glycol compound include diethylene glycol, ethylene glycol and polyethylene glycol.

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