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- Etching a substrate: processes
- Nongaseous phase etching of substrate
- Using film of etchant between a stationary surface and a...
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Sung-Taek Moon
Sung-Taek
Moon
Etching a substrate: processes
Nongaseous phase etching of substrate
Using film of etchant between a stationary surface and a...
Inventor
active
Affiliated with
Method of forming silicon oxide layer in semiconductor...
Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate
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Polishing pad, platen, method of monitoring, method of...
Abrading – Precision device or process - or with condition responsive... – By optical sensor
Reexamination Certificate
[ 0.00 ] – not rated yet
Polishing pad, platen, method of monitoring, method of...
Abrading – Precision device or process - or with condition responsive... – By optical sensor
Reexamination Certificate
[ 0.00 ] – not rated yet
Polishing pad, platen, method of monitoring, method of...
Abrading – Precision device or process - or with condition responsive... – By optical sensor
Reexamination Certificate
[ 0.00 ] – not rated yet
Slurry compositions, methods of preparing slurry...
Compositions – Etching or brightening compositions
Reexamination Certificate
[ 0.00 ] – not rated yet
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Profile ID: LFUS-PAI-P-2363249
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