4. Etching a substrate: processes
  5. Nongaseous phase etching of substrate
  6. Using film of etchant between a stationary surface and a...

Maki Angadi

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Alumina abrasive for chemical mechanical polishing

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Alumina abrasive for chemical mechanical polishing

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
Reexamination Certificate

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Apparatus and method for removing a photoresist structure...

Semiconductor device manufacturing: process – Chemical etching – Liquid phase etching
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Apparatus and method for treating substrates

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Apparatus and method of removing particles

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
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