4. Communications: radio wave antennas
  5. Antennas
  6. Slot type

Masaharu Takahashi

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Plasma device and plasma generating method

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Slot array antenna and plasma processing apparatus

Communications: radio wave antennas – Antennas – Slot type
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Profile ID: LFUS-PAI-P-2964328

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