4. Adhesive bonding and miscellaneous chemical manufacture
  5. Differential fluid etching apparatus
  6. With microwave gas energizing means

Nobuo Ishii

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Apparatus for plasma processing

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Concentric rings with different RF energies applied thereto

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
Patent

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Ion-producing apparatus

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Electron or ion source
Patent

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Method and apparatus for measuring small displacement

Data processing: measuring – calibrating – or testing – Measurement system – Dimensional determination
Reexamination Certificate

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Method and apparatus for measuring temperature of substrate

Thermal measuring and testing – Temperature measurement – In spaced noncontact relationship to specimen
Reexamination Certificate

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Profile ID: LFUS-PAI-P-70555

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