Valves and valve actuation – With means to increase head and seat contact pressure – Gate valve
Reexamination Certificate
2007-06-01
2010-10-05
Fristoe, Jr., John K (Department: 3753)
Valves and valve actuation
With means to increase head and seat contact pressure
Gate valve
C251S175000, C251S328000
Reexamination Certificate
active
07806383
ABSTRACT:
Embodiments of a valve assembly for a process chamber having improved seal performance are provided herein. In some embodiments, a valve assembly for a process chamber includes a housing having an opening disposed in a wall thereof and through which a substrate may be transferred; a door movably coupled to the housing in a plane substantially parallel to the wall of the housing for selectively sealing the opening; a compressible sealing member disposed at least partly between an upper surface of the door and a corresponding surface of the housing for forming a seal therebetween by compression of the compressible sealing member in a direction substantially perpendicular to the wall when the door is in a closed position; and a mechanism for restricting the exposure of the compressible sealing member to an environment on a process chamber side of the housing.
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Korean Notice to File a Response dated Sep. 29, 2008 for Korean Patent Application No. 10-2007-0088295.
Bang Won
Lubormirsky Dimitry
Tran Toan Q.
Tsuei Lun
Applied Materials Inc.
Fristoe, Jr. John K
Moser IP Law Group
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