4. Coating apparatus
  5. Gas or vapor deposition

Won Bang

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Clog resistant gas delivery system

Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Reexamination Certificate

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Clog resistant injection valve

Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Reexamination Certificate

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Clog resistant injection valve

Coating processes – Coating by vapor – gas – or smoke
Reexamination Certificate

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Clog-resistant gas delivery system

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Coating for parts used in semiconductor processing chambers

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Profile ID: LFUS-PAI-P-446180

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