Fishing – trapping – and vermin destroying
Patent
1995-03-08
1996-12-24
Powell, William
Fishing, trapping, and vermin destroying
1566571, 216 2, 437233, H01L 2100, B44C 122
Patent
active
055873430
ABSTRACT:
A method for fabricating a semiconductor sensor wherein deflection of a movable member is disclosed. A silicon oxide film is formed on a silicon substrate, and a movable member composed of polycrystalline silicon is formed on the silicon oxide film by means of a low-pressured chemical vapor deposition process. At this time, silane is caused to flow into an oven, and the supply of silane is stopped when a layer of polycrystalline silicon has been deposited on the silicon substrate, and a first polycrystalline silicon layer is formed. By means of stopping the supply of silane, a silicon oxide layer of a thickness of several angstroms to several tens of angstroms is formed on the first polycrystalline silicon layer by atmosphere O.sub.2. A second polycrystalline silicon layer of a thickness of 1 .mu.m is formed on the silicon oxide layer by means of causing silane to flow into the oven. Patterning by dry etching or the like through a photo-lithographic process is performed to form a movable member. The silicon oxide film below the movable member is then etched.
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Ao Kenichi
Kano Kazuhiko
Kanosue Masakazu
Takeuchi Yukihiro
Uenoyama Hirofumi
Nippondenso Co. Ltd.
Powell William
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