4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Liquid phase etching

Yukihiro Takeuchi

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Acceleration sensor and method for manufacturing the same

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Reexamination Certificate

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Acceleration sensor and method for manufacturing the same

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Reexamination Certificate

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Acceleration sensor using MIS-like transistors

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
Patent

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Airflow meter

Measuring and testing – Volume or rate of flow – Thermal type
Reexamination Certificate

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Capacitance type acceleration sensor

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Reexamination Certificate

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Profile ID: LFUS-PAI-P-430509

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