4. Measuring and testing
  5. Speed, velocity, or acceleration
  6. Acceleration determination utilizing inertial element

Masakazu Kanosue

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Method for fabricating a semiconductor acceleration sensor

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
Patent

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Method for fabrication of a semiconductor sensor

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
Patent

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Method for manufacturing semiconductor dynamic quantity sensor

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal
Reexamination Certificate

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Semiconductor acceleration sensor with beam structure

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Responsive to non-optical – non-electrical signal
Patent

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Semiconductor acceleration sensor with source and drain regions

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
Patent

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Profile ID: LFUS-PAI-P-1251923

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