Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate
2006-03-14
2006-03-14
Chaudhari, Chandra (Department: 2891)
Semiconductor device manufacturing: process
Making field effect device having pair of active regions...
Having insulated gate
C438S672000
Reexamination Certificate
active
07012002
ABSTRACT:
A semiconductor memory device and a method for fabricating the same. Particularly, the semiconductor memory device includes at least two capacitors to decrease the thickness of an insulation layer and increase the size of each capacitor, wherein the thickness of the insulation layer and the size of the capacitor are factors for increasing parasitic capacitance and leakage currents. Also, the two capacitors are arranged diagonally, thereby widening the width of each capacitor formed. Furthermore, in forming double capacitors according to the preferred embodiment of the present invention, an additional reticle is not required to form the contact holes for each capacitor due to their inverted disposition relationship.
REFERENCES:
patent: 5851875 (1998-12-01), Ping
patent: 6451651 (2002-09-01), Park et al.
patent: 6479341 (2002-11-01), Lu
Bok Cheol-Kyu
Kim Seo-Min
Blakely & Sokoloff, Taylor & Zafman
Chaudhari Chandra
Hynix / Semiconductor Inc.
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