4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Cheol-Kyu Bok

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Cross-linking polymer for organic anti-reflective coating,...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
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Method and forming fine patterns of semiconductor devices...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Semiconductor memory device and method for fabricating the same

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
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Semiconductor memory device and method for fabricating the same

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Profile ID: LFUS-PAI-P-2562777

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