Semiconductor devices including buried bit lines

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate

Reexamination Certificate

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C438S257000, C438S287000, C438S528000, C438S664000

Reexamination Certificate

active

07846796

ABSTRACT:
A semiconductor device includes a plurality of channel structures on a semiconductor substrate. A bit line groove having opposing sidewalls is defined between sidewalls of adjacent ones of the plurality of channel structures. A plurality of bit lines are formed on corresponding ones of the opposing sidewalls, and the plurality of bit lines are electrically isolated from each other

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patent: 6365944 (2002-04-01), Reisinger et al.
patent: 6548861 (2003-04-01), Palm et al.
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patent: 2007/0222019 (2007-09-01), Rochefort et al.
patent: 2002-508594 (2002-03-01), None
patent: 1998-0011894 (1998-04-01), None
patent: 2001-0042141 (2001-05-01), None
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patent: 10-2004-0096339 (2004-11-01), None
English language abstract of Japanese Publication No. 2001-0042141.
English language abstract of Korean Publication No. 2001-0112829.
English language abstract of Japanese Publication No. 2002-508594.

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