Semiconductor device with reduced resistance of bit lines...

Details Semiconductor device with reduced resistance of bit lines... Semiconductor device with reduced resistance of bit lines...

2011-01-18

2011-01-18

Geyer, Scott B (Department: 2812)

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

Having insulated gate

C257S329000

Reexamination Certificate

active

07871887

ABSTRACT:
A semiconductor device comprises buried bit lines which are formed to be brought into contact with drain areas of vertical pillar transistors. The buried bit lines are arranged along a first direction in a silicon substrate. The buried bit lines are formed of epi-silicon to reduce the resistance of the buried bit lines.

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