Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate
2009-07-10
2010-10-19
Monbleau, Davienne (Department: 2893)
Semiconductor device manufacturing: process
Making field effect device having pair of active regions...
Having insulated gate
C257SE21633, C438S199000
Reexamination Certificate
active
07816201
ABSTRACT:
A semiconductor device according to an example of the present invention includes a first semiconductor region of a first conductivity type, a first MIS transistor of a second conductivity type formed in the first semiconductor region, a second semiconductor region of a second conductivity type, and a second MIS transistor of a first conductivity type formed in the second semiconductor region. A first gate insulating layer of the first MIS transistor is thicker than a second gate insulating layer of the second MIS transistor, and a profile of impurities of the first conductivity type in a channel region of the second MIS transistor has peaks.
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Ishibashi Shigeru
Kato Yoshiko
Noguchi Mitsuhiro
Kabushiki Kaisha Toshiba
Monbleau Davienne
Oblon, Spivak McClelland, Maier & Neustadt, L.L.P.
Rodela Eduardo A
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