Semiconductor device and method of manufacturing the same

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate

Reexamination Certificate

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Details

C257S310000, C257S751000, C257SE21170, C257SE21006, C257SE21021, C257SE21304, C257SE21585

Reexamination Certificate

active

07341908

ABSTRACT:
Provided are a semiconductor device including a reliable interconnect and a method of manufacturing the same. The semiconductor device includes a substrate, an inter-metal dielectric (IMD) pattern having an opening, an amorphous metallic nitride layer formed on the inner surface of the opening, a diffusion barrier layer formed on the amorphous metallic nitride layer, and a conductive layer filled into the opening having the diffusion barrier layer.

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patent: 6479898 (2002-11-01), Hopper et al.
patent: 6538324 (2003-03-01), Tagami et al.
patent: 6545357 (2003-04-01), Chopra
patent: 6893541 (2005-05-01), Chiang et al.
patent: 7041595 (2006-05-01), Chopra
patent: 2001-007204 (2001-01-01), None
patent: 1998-060592 (1998-10-01), None
patent: 2003-0001103 (2003-01-01), None
patent: 2003-0048618 (2003-06-01), None
patent: 2004-0007111 (2004-01-01), None

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