Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate
2007-03-13
2010-06-29
Pham, Thanh V (Department: 2894)
Semiconductor device manufacturing: process
Making field effect device having pair of active regions...
Having insulated gate
C438S596000, C438S257000, C438S593000
Reexamination Certificate
active
07745288
ABSTRACT:
A semiconductor device having a non-volatile memory is disclosed, whose disturb defect can be diminished or prevented. A memory cell of the non-volatile memory has a memory gate electrode formed over a main surface of a semiconductor substrate through an insulating film for charge storage. A first side wall is formed on a side face of the memory gate electrode, and at a side face of the first side wall, a second side wall is formed. On an upper surface of an n+-type semiconductor region for source in the memory cell there is formed a silicide layer whose end portion on the memory gate electrode MG side is defined by the second side wall.
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patent: 5064776 (1991-11-01), Roberts
patent: 2006/0008992 (2006-01-01), Shukuri
patent: 2002-198523 (2002-07-01), None
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Hashimoto Takashi
Ishii Yasushi
Kawashima Yoshiyuki
Machida Satoru
Matsui Toshikazu
Henry Caleb
Miles & Stockbridge P.C.
Pham Thanh V
Renesas Technology Corp.
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