Semiconductor device and a method of manufacturing the same

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate

Reexamination Certificate

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Details

C438S596000, C438S257000, C438S593000

Reexamination Certificate

active

07745288

ABSTRACT:
A semiconductor device having a non-volatile memory is disclosed, whose disturb defect can be diminished or prevented. A memory cell of the non-volatile memory has a memory gate electrode formed over a main surface of a semiconductor substrate through an insulating film for charge storage. A first side wall is formed on a side face of the memory gate electrode, and at a side face of the first side wall, a second side wall is formed. On an upper surface of an n+-type semiconductor region for source in the memory cell there is formed a silicide layer whose end portion on the memory gate electrode MG side is defined by the second side wall.

REFERENCES:
patent: 5064776 (1991-11-01), Roberts
patent: 2006/0008992 (2006-01-01), Shukuri
patent: 2002-198523 (2002-07-01), None
patent: 2004-079893 (2004-03-01), None
patent: 2004-266203 (2004-09-01), None

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