Semiconductor apparatus and method of manufacturing...

Details Semiconductor apparatus and method of manufacturing... Semiconductor apparatus and method of manufacturing...

2008-05-29

2010-11-09

Monbleau, Davienne (Department: 2893)

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

Having insulated gate

C257SE21418

Reexamination Certificate

active

07829417

ABSTRACT:
A semiconductor apparatus with a superjunction structure includes a gate electrode which fills a trench that is formed in an epitaxial layer, and a column region which is surrounded by the gate electrode in a plane view. A photomask for forming the column region is elaborated. The photomask has a compensation pattern that compensates a deformation of a photo resist pattern caused by photo interference and a deformation of the ion implantation region diffused by heat treatment. Therefore extending direction of the gate electrode and the outer edge of the column region are substantially parallel.

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