Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Patent
1996-10-15
1999-05-25
Brown, Peter Toby
Semiconductor device manufacturing: process
Making field effect device having pair of active regions...
Having insulated gate
438201, 438203, 438279, 438287, H01L 21336
Patent
active
059077794
ABSTRACT:
An integrated circuit is fabricated by forming first source and drain regions and contact regions which electrically contact respective first source and drain regions, for first field effect transistors in an integrated circuit. Then, second source and drain regions for second field effect transistors in the integrated circuit are formed. By simultaneously forming landing pads which electrically contact the integrated circuit substrate between first spaced apart gates, and doping the integrated circuit substrate which electrically contacts the landing pads, an additional protective layer may not be needed, thereby simplifying the fabrication process.
REFERENCES:
patent: 4221044 (1980-09-01), Godejahn, Jr. et al.
patent: 4516313 (1985-05-01), Turi et al.
patent: 4992389 (1991-02-01), Ogura et al.
patent: 5183773 (1993-02-01), Miyata
Brown Peter Toby
Duong Khanh
Samsung Electronics Co,. Ltd.
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