Selective landing pad fabricating methods for integrated circuit

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate

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438201, 438203, 438279, 438287, H01L 21336

Patent

active

059077794

ABSTRACT:
An integrated circuit is fabricated by forming first source and drain regions and contact regions which electrically contact respective first source and drain regions, for first field effect transistors in an integrated circuit. Then, second source and drain regions for second field effect transistors in the integrated circuit are formed. By simultaneously forming landing pads which electrically contact the integrated circuit substrate between first spaced apart gates, and doping the integrated circuit substrate which electrically contacts the landing pads, an additional protective layer may not be needed, thereby simplifying the fabrication process.

REFERENCES:
patent: 4221044 (1980-09-01), Godejahn, Jr. et al.
patent: 4516313 (1985-05-01), Turi et al.
patent: 4992389 (1991-02-01), Ogura et al.
patent: 5183773 (1993-02-01), Miyata

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