Scanning electron microscope or similar equipment capable of dis

Details Scanning electron microscope or similar equipment capable of dis Scanning electron microscope or similar equipment capable of dis

1981-12-03

1983-12-13

Smith, Alfred E.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250311, G01N 2300, G21K 700

Patent

active

044206860

ABSTRACT:
The specification describes a scanning electron microscope or similar equipment capable of irradiating a plurality of beams of charged particles onto a specimen and displaying simultaneously the plurality of images of the specimen. It comprises charged particle beam modulation means to modulate the intensities of the beams of charged particles through their deflection by different frequencies, a detector capable of detecting secondary electrons or the like given off from the specimen, demodulation selector means capable of demodulating signals from the detector and selecting each specimen image signal, and display means capable of displaying the plurality of images of the specimen. The plurality of beams may be irradiated in parallel onto different spots on the specimen or may be directed to one specific spot on the specimen. Thus, a plurality of specimen images can be displayed extremely efficiently and, also, simultaneously by simple means.

REFERENCES:
patent: 4039829 (1977-08-01), Kato et al.

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