4. Radiant energy
  5. With charged particle beam deflection or focussing
  6. Magnetic lens

Shigetomo Yamazaki

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Scanning electron microscope or similar equipment

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent

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Scanning electron microscope or similar equipment capable of dis

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent

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Scanning electron microscope or similar equipment with tiltable

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent

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Profile ID: LFUS-PAI-P-722789

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