Scanning electron microscope or similar equipment capable of dis

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

250311, G01N 2300, G21K 700

Patent

active

044206860

ABSTRACT:
The specification describes a scanning electron microscope or similar equipment capable of irradiating a plurality of beams of charged particles onto a specimen and displaying simultaneously the plurality of images of the specimen. It comprises charged particle beam modulation means to modulate the intensities of the beams of charged particles through their deflection by different frequencies, a detector capable of detecting secondary electrons or the like given off from the specimen, demodulation selector means capable of demodulating signals from the detector and selecting each specimen image signal, and display means capable of displaying the plurality of images of the specimen. The plurality of beams may be irradiated in parallel onto different spots on the specimen or may be directed to one specific spot on the specimen. Thus, a plurality of specimen images can be displayed extremely efficiently and, also, simultaneously by simple means.

REFERENCES:
patent: 4039829 (1977-08-01), Kato et al.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Scanning electron microscope or similar equipment capable of dis does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Scanning electron microscope or similar equipment capable of dis, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Scanning electron microscope or similar equipment capable of dis will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-805588

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.