Abrading – Abrading process – Combined abrading
Reexamination Certificate
2011-04-18
2011-11-29
Nguyen, Dung Van (Department: 3723)
Abrading
Abrading process
Combined abrading
C451S059000, C451S398000
Reexamination Certificate
active
08066551
ABSTRACT:
A retaining ring can be shaped by machining or lapping the bottom surface of the ring to form a shaped profile in the bottom surface. The bottom surface of the retaining ring can include flat, sloped and curved portions. The lapping can be performed using a machine that dedicated for use in lapping the bottom surface of retaining rings. During the lapping the ring can be permitted to rotate freely about an axis of the ring. The bottom surface of the retaining ring can have curved or flat portions.
REFERENCES:
patent: 5205082 (1993-04-01), Shendon et al.
patent: 5584751 (1996-12-01), Kobayashi et al.
patent: 7094133 (2006-08-01), Masunaga et al.
Allen Aden Martin
Balagani Venkata R.
Chen Hung Chih
De Lamenie Romain Beau
Doan Trung T.
Applied Materials Inc.
Fish & Richardson P.C.
Nguyen Dung Van
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