Active solid-state devices (e.g. – transistors – solid-state diode – Regenerative type switching device – Bidirectional rectifier with control electrode
Reexamination Certificate
2007-10-02
2007-10-02
Nhu, David (Department: 2818)
Active solid-state devices (e.g., transistors, solid-state diode
Regenerative type switching device
Bidirectional rectifier with control electrode
C257S170000, C257S484000, C257SE21230, C257SE21216
Reexamination Certificate
active
11127790
ABSTRACT:
A retaining ring for use with electrochemical mechanical processing is described. The retaining ring has a generally annular body formed with a conductive portion and a non-conductive portion. The non-conductive portion contacts the substrate during polishing. The conductive portion is electrically biased during polishing to reduce the edge effect that tends to occur with conventional electrochemical mechanical processing systems.
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Chen Liang-Yuh
Duboust Alain
Manens Antoine P.
Shrauti Suresh
Wang Yan
Applied Materials Inc.
Fish & Richardson
Nhu David
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