Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
Patent
1997-09-08
1999-10-12
Hamilton, Cynthia
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Making electrical device
4302811, 430910, G03F 740
Patent
active
059653280
ABSTRACT:
A radiation sensitive resin composition comprising:
REFERENCES:
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patent: 4629680 (1986-12-01), Iwasaki et al.
patent: 4777115 (1988-10-01), Koch et al.
patent: 5419998 (1995-05-01), Mayes et al.
Kurisu, Insulation/Circuits, Sep. 1981, vol. 27, No. 10, pp. 107-111.
Chiba Hideki
Igarashi Katsutoshi
Michino Yoshiyuki
Ota Toshiyuki
Sano Kimiyasu
Hamilton Cynthia
JSR Corporation
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