Radiant energy – Inspection of solids or liquids by charged particles – Positive ion probe or microscope type
Patent
1989-06-09
1990-03-27
Anderson, Bruce C.
Radiant energy
Inspection of solids or liquids by charged particles
Positive ion probe or microscope type
250307, 250398, 250397, 250287, H01J 3708, H01J 4940
Patent
active
049123270
ABSTRACT:
An ion gun for producing a pulsed microfocused beam of ions comprises an ion source arranged to produce a continuous ion beam along a z-axis toward a collector having an aperture on the axis. A deflector is arranged to maintain the beam substantially stationary and incident on the aperture for a pulse time, to deflect the beam away from the aperture to the collector and subsequently to return the beam to be incident at the aperture. A focussing lens focusses the beam from the deflection point to a final image point, and a condensing lens focusses the beam at the deflection point. A mass filter selects a single ion species, and a second deflector deflects the beam orthogonally to the deflector so that the returning path of the beam on the collector does not cross the aperture. A stigmator and a beam scanner are also provided.
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Anderson Bruce C.
VG Instruments Group Limited
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