4. Radiant energy
  5. Inspection of solids or liquids by charged particles
  6. Positive ion probe or microscope type

Allen R. Waugh

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Apparatus for surface analysis

Radiant energy – Inspection of solids or liquids by charged particles – Positive ion probe or microscope type
Patent

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Pulsed microfocused ion beams

Radiant energy – Inspection of solids or liquids by charged particles – Positive ion probe or microscope type
Patent

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Time-of-flight mass spectrometry

Radiant energy – Ionic separation or analysis – Ion beam pulsing means with detector synchronizing means
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Profile ID: LFUS-PAI-P-198390

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