Projection imaging type electron microscope

Details Projection imaging type electron microscope Projection imaging type electron microscope

2008-09-09

2008-09-09

Souw, Bernard E (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

C250S310000, C250S3960ML, C250S397000, C250S492300

Reexamination Certificate

active

11177140

ABSTRACT:
It is an object of the present invention to provide an projection imaging type electron microscope in which the imposition of restrictions on the design of the illumination electron optical system by the conditions of the projection electron optical system is alleviated, so that the degree of freedom in the design of the illumination electron optical system is increased. Generated electrons6b(principal rays) emitted from the sample5parallel to the optical axis are focused by a cathode lens so that these electrons cross the optical axis3at one point. This point is the first crossover. The generated electrons6bare oriented parallel to the optical axis by the cathode lens4a, and are focused as an image at the position of the electromagnetic prism2; these electrons pass through the stigmator7, and are incident on the relay lens8a. These electrons are again focused, and cross the optical axis3at one point. This position is the second crossover. An aperture diaphragm11is disposed in this second crossover position. As a result, the need to install an aperture diaphragm in the first crossover position is eliminated, so that design of the illumination electron optical system is facilitated.

REFERENCES:
patent: 4434367 (1984-02-01), Yonezawa
patent: 6184526 (2001-02-01), Kohama et al.
patent: 6608308 (2003-08-01), Takagi et al.
patent: 6661008 (2003-12-01), Takagi et al.
patent: 6717141 (2004-04-01), Rouse et al.
patent: 6717145 (2004-04-01), Takagi et al.
patent: 6765217 (2004-07-01), Nishimura et al.
patent: 6992290 (2006-01-01), Watanabe et al.
patent: 7109483 (2006-09-01), Nakasuji et al.
patent: 7135676 (2006-11-01), Nakasuji et al.
patent: 7138629 (2006-11-01), Noji et al.
patent: 7297949 (2007-11-01), Nakasuji et al.
patent: 7351969 (2008-04-01), Watanabe et al.
patent: 2002/0130262 (2002-09-01), Nakasuji et al.
patent: 2003/0030007 (2003-02-01), Karimata et al.
patent: 2005/0045821 (2005-03-01), Noji et al.
patent: 2006/0011833 (2006-01-01), Ren
patent: 2006/0169900 (2006-08-01), Noji et al.
patent: 2007/0045536 (2007-03-01), Nakasuji et al.

Affiliated with

Also associated with

Rating

Projection imaging type electron microscope does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Projection imaging type electron microscope, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Projection imaging type electron microscope will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3911275