Processing method using probe of scanning probe microscope

Details Processing method using probe of scanning probe microscope Processing method using probe of scanning probe microscope

2007-08-21

2007-08-21

Berman, Jack I. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Positive ion probe or microscope type

C250S306000, C310S316020, C310S317000, C204S192320

Reexamination Certificate

active

11135076

ABSTRACT:
A processing method uses a probe of a scanning probe microscope. A fine marker is formed in a processing material by thrusting the probe, which is made of a material harder than the processing material, into a portion of the processing material disposed in the vicinity of an area of the processing material to be processed by the probe during a processing operation. A position of the fine marker on the processing material is detected during the processing operation. A drift amount of the area of the processing material is calculated in accordance with the detected position of the fine marker. A position of the area of the processing material is corrected in accordance with the calculated drift amount.

REFERENCES:
patent: 5557156 (1996-09-01), Elings
patent: 6953519 (2005-10-01), Shirakawabe et al.
patent: 2005/0193576 (2005-09-01), Hollman et al.

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