4. Chemistry: electrical and wave energy
  5. Apparatus
  6. Coating, forming or etching by sputtering

Peijun Ding

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Alternate steps of IMP and sputtering process to improve...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Auxiliary magnet array in conjunction with magnetron sputtering

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Barrier applications for aluminum planarization

Semiconductor device manufacturing: process – Including control responsive to sensed condition
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Barrier applications for aluminum planarization

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Barrier layer for electroplating processes

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Profile ID: LFUS-PAI-P-26392

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