Process for producing semiconductor integrated circuit device

Details Process for producing semiconductor integrated circuit device Process for producing semiconductor integrated circuit device

2007-11-27

2007-11-27

Toledo, Fernando L. (Department: 2823)

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

Having insulated gate

C438S241000, C438S287000, C438S685000, C438S773000, C257SE21194, C257SE21582

Reexamination Certificate

active

11553690

ABSTRACT:
When an oxidation treatment for regenerating a gate insulating film6is performed after forming gate electrodes7A of a polymetal structure in which a WNxfilm and a W film are stacked on a polysilicon film, a wafer1is heated and cooled under conditions for reducing a W oxide27on the sidewall of each gate electrode7A. As a result, the amount of the W oxide27to be deposited on the surface of the wafer1is reduced.

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