Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Electron beam imaging
Patent
1996-03-15
1996-10-22
Baxter, Janet C.
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Electron beam imaging
430326, 430942, 430967, G03F 730
Patent
active
055675697
ABSTRACT:
Quinone diazo compounds having bonded to the diazo ring or directly bonded to a ring of the compound, certain non-metallic atoms that improve the photosensitivity thereof are provided. These quinone diazo compounds are useful as photoactive compounds in photoresist compositions, and particularly positive photoresist composition employed in x-ray or electron beam radiation. Also provided is a method for preparing compounds of the present invention.
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Aviram Ari
Brunsvold William R.
Bucca Daniel
Conley, Jr. Willard E.
Seeger David E.
Baxter Janet C.
International Business Machines - Corporation
Young Christopher G.
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