Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Radiation sensitive composition or product or process of making
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active
Acid scavengers for use in chemically amplified photoresists
Antireflective coating films
Deactivated aromatic amines as additives in acid-catalyzed...
High sensitivity resists having autodecomposition temperatures g
Highly sensitive dry developable deep UV photoresist
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