Semiconductor device manufacturing: process – Chemical etching
Reexamination Certificate
2008-05-13
2008-05-13
Norton, Nadine G. (Department: 1792)
Semiconductor device manufacturing: process
Chemical etching
C438S622000, C438S637000, C438S694000, C216S013000, C216S041000
Reexamination Certificate
active
11130078
ABSTRACT:
A process for preparing an electronics structure involves coating a substrate stack with a sacrificial multilayer hardmask stack, developing a pattern in a resist layer coated on a topmost layer of the multilayer hardmask stack, transferring the pattern into the hardmask stack, blocking a portion of the pattern, and then transferring an unblocked portion of the pattern into the substrate stack. Electronics structures prepared with the process are useful to prepare electronics devices, such as computers and the like. It is emphasized that this abstract is provided to comply with the rules requiring an abstract which will allow a searcher or other reader quickly to ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the appended issued claims.
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Colburn Matthew Earl
Donaton Ricardo Alves
Liu Xiao Hu
Murray Conal E.
Nitta Satyanarayana Venkata
Dahimene Mahmoud
Nogent Theresa O'Rourke
Nogent & Smith
Norton Nadine G.
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