4. Semiconductor device manufacturing: process
  5. Chemical etching

Satyanarayana Venkata Nitta

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Line level air gaps

Active solid-state devices (e.g. – transistors – solid-state diode – Integrated circuit structure with electrically isolated... – Including dielectric isolation means
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Method for selective extraction of sacrificial place-holding...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method of forming multilevel interconnect structure...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Multilevel interconnect structure containing air gaps and...

Active solid-state devices (e.g. – transistors – solid-state diode – Integrated circuit structure with electrically isolated... – Including dielectric isolation means
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Process for preparing electronics structures using a...

Semiconductor device manufacturing: process – Chemical etching
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Profile ID: LFUS-PAI-P-2366654

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