4. Semiconductor device manufacturing: process
  5. Formation of electrically isolated lateral semiconductive...
  6. Having air-gap dielectric

Matthew Earl Colburn

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Line level air gaps

Active solid-state devices (e.g. – transistors – solid-state diode – Integrated circuit structure with electrically isolated... – Including dielectric isolation means
Reexamination Certificate

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Method to generate airgaps with a template first scheme and...

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Having air-gap dielectric
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Process for preparing electronics structures using a...

Semiconductor device manufacturing: process – Chemical etching
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Process for preparing electronics structures using a...

Semiconductor device manufacturing: process – Chemical etching
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Step and flash imprint lithography

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mechanically forming pattern into a resist
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Profile ID: LFUS-PAI-P-2178797

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