Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate
2007-10-09
2007-10-09
Estrada, Michelle (Department: 2823)
Semiconductor device manufacturing: process
Coating with electrically or thermally conductive material
To form ohmic contact to semiconductive material
C257SE21309, C257SE21508, C438S627000, C438S638000
Reexamination Certificate
active
11164223
ABSTRACT:
Device and method of fabricating device. The device includes a dual damascene line having a metal line and a via, and a redundant liner arranged to divide the metal line. The method includes forming a trench in a metal stripe of a dual damascene line, depositing a barrier layer in the trench, and filling a remainder of the trench with metal.
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Agarwala Birendra N.
Nguyen Du Binh
Rathore Hazara Singh
Estrada Michelle
Greenblum & Bernstein P.L.C.
Petrokaitis Joseph
Stark Jarrett J.
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