Probe driving method, and probe apparatus

Details Probe driving method, and probe apparatus Probe driving method, and probe apparatus

2005-11-01

2005-11-01

Lee, John R. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S307000, C073S105000

Reexamination Certificate

active

06960765

ABSTRACT:
A probe driving method and a probe apparatus for bringing a probe into contact with the surface of a sample in a safe and efficient manner by monitoring the probe height. Information about the height of the probe from the sample surface is obtained by detecting a probe shadow appearing immediately before the probe contacts the sample, or based on a change in relative positions of a probe image and a sample image that are formed as an ion beam is irradiated diagonally.

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