4. Radiant energy
  5. Inspection of solids or liquids by charged particles

Isamu Sekihara

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Apparatus for detecting defect in device and method of...

Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element
Reexamination Certificate

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Apparatus for inspecting defects of devices and method of...

Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element
Reexamination Certificate

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Probe driving method, and probe apparatus

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Probe driving method, and probe apparatus

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Sample inspection apparatus

Radiant energy – Inspection of solids or liquids by charged particles
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2264618

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