Positioning device comprising a z-manipulator and a .theta.-mani

Details Positioning device comprising a z-manipulator and a .theta.-mani Positioning device comprising a z-manipulator and a .theta.-mani

1986-09-22

1988-05-24

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

2504921, G21K 510

Patent

active

047468009

ABSTRACT:
A positioning device for manipulation of objects, provided with an object holder (5) which is rotatable about an axis of rotation (.theta.) by means of a .theta.-manipulator and is displaceable by translation along a Z-axis coinciding with the axis of rotation (.theta.) by means of a Z-manipulator. The two manipulators are coupled to each other by means of a separator (17, 153) in such a manner that the .theta.-movement and the Z-movement are independent of each other. The positioning device is particularly suitable for manipulation of objects in the submicron range, such as takes place, for example, in optical lithographic devices according to the invention.

REFERENCES:
patent: 3684904 (1972-08-01), Galutvz et al.
patent: 3790155 (1974-02-01), Longamore
patent: 3887811 (1975-06-01), Liveszy
patent: 4057347 (1977-11-01), Moriyama et al.
patent: 4506154 (1985-03-01), Scire
patent: 4516029 (1985-05-01), Tucker

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