Electricity: electrical systems and devices
Control circuits for electromagnetic devices
Systems for magnetizing, demagnetizing, or controlling the...
Inventor
active
Apparatus for processing an object with high position accurancy
Apparatus for processing an object with high position accurancy
Electromagnetic support with current-independent characteristics
Electromagnetic support with unilateral control currents
Lithographic apparatus
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Profile ID: LFUS-PAI-P-721276