Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Responsive to electromagnetic radiation
Reexamination Certificate
2011-06-14
2011-06-14
Smith, Zandra (Department: 2822)
Semiconductor device manufacturing: process
Making device or circuit responsive to nonelectrical signal
Responsive to electromagnetic radiation
C438S095000, C438S102000, C257S003000, C257SE45002
Reexamination Certificate
active
07960203
ABSTRACT:
A method of manufacturing an electrode is provided that includes providing a pillar of a first phase change material atop a conductive structure of a dielectric layer; or the inverted structure; forming an insulating material atop dielectric layer and adjacent the pillar, wherein an upper surface of the first insulating material is coplanar with an upper surface of the pillar; recessing the upper surface of the pillar below the upper surface of the insulating material to provide a recessed cavity; and forming a second phase change material atop the recessed cavity and the upper surface of the insulating material, wherein the second phase change material has a greater phase resistivity than the first phase change material.
REFERENCES:
patent: 7324365 (2008-01-01), Gruening-von Schwerin et al.
patent: 7488967 (2009-02-01), Burr et al.
patent: 7541609 (2009-06-01), Nirschl et al.
patent: 7579616 (2009-08-01), Chen et al.
patent: 7642622 (2010-01-01), Yi et al.
patent: 7671353 (2010-03-01), Philipp et al.
patent: 7719886 (2010-05-01), Philipp et al.
patent: 7728319 (2010-06-01), Goux et al.
patent: 2007/0246439 (2007-10-01), Lee et al.
patent: 2008/0149909 (2008-06-01), Philipp et al.
Breitwisch Matthew J.
Cheek Roger W.
Joseph Eric A.
Lam Chung H.
Schrott Alejandro G.
Alexanian Vazken
Duong Khanh B
International Business Machines - Corporation
Scully , Scott, Murphy & Presser, P.C.
Smith Zandra
LandOfFree
Pore phase change material cell fabricated from recessed pillar does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Pore phase change material cell fabricated from recessed pillar, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Pore phase change material cell fabricated from recessed pillar will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2727335