4. Etching a substrate: processes
  5. Gas phase etching of substrate
  6. Etching inorganic substrate

Roger W. Cheek

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CMP polishing pad backside modifications for advantageous polish

Abrading – Abrading process – Glass or stone abrading
Patent

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In-situ monitoring of chemical vapor deposition process by...

Semiconductor device manufacturing: process – With measuring or testing
Reexamination Certificate

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Method for controlled removal of material from a solid surface

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
Patent

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Method for controlled removal of material from a solid surface

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Reexamination Certificate

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Method for controlling extrusions in aluminum metal lines...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1610433

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