Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent
1999-03-02
2000-07-25
Jackson, Stephen W.
Electricity: electrical systems and devices
Electric charge generating or conducting means
Use of forces of electric charge or field
361115, H01G 2300
Patent
active
060943343
ABSTRACT:
An electrostatic chuck 20 for holding a substrate 25 in a process chamber 30 comprises an electrostatic member 115 comprising a polymer 120 covering an electrode 125, the polymer 120 having a receiving surface 135 for receiving the substrate 25. A heater 130 abutting the polymer 120 is provided to heat the substrate 25 during processing of the substrate 25. The heater 130 has a resistance that is sufficiently low to heat the substrate 25 without causing excessive thermal degradation of the polymer 120.
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Askari Syed H.
Bedi Surinder S.
Clinton Jon T.
Kholodenko Arnold
Shamouilian Shamouil
Applied Materials Inc.
Jackson Stephen W.
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