Poly resistor on a semiconductor device

Details Poly resistor on a semiconductor device Poly resistor on a semiconductor device

2010-08-04

2011-11-15

Ghyka, Alexander (Department: 2812)

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

Having insulated gate

C438S171000, C438S183000, C438S382000

Reexamination Certificate

active

08058125

ABSTRACT:
The present disclosure provides a poly resistor on a semiconductor device and a method of fabricating the same. In an embodiment, a poly silicon resistor device is formed by providing a substrate having a first region and a second region. A dummy gate stack is formed on the substrate in the first region, wherein the dummy gate stack has a dummy gate stack thickness extending above the substrate. A poly silicon resister is formed on the substrate in the second region, wherein the poly silicon resistor has a poly silicon resistor thickness extending above the substrate a distance which is less than the dummy gate stack thickness. A dopant is implanted into the substrate in the first region thereby forming a source region and a drain region in the first region of the substrate. The dopant is also implanted into the poly silicon resistor. An inter-level dielectric (ILD) layer is formed on the substrate over the dummy gate stack and also over the poly silicon resistor. The ILD layer is planarized, thereby exposing the dummy gate stack and leaving a portion of the ILD layer over the poly silicon resistor. The dummy gate stack is replaced with a high k metal gate while using the portion of the ILD layer over the poly silicon resistor as a mask to protect the poly silicon resistor during replacement of the dummy gate stack with the high k metal gate.

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Da-Yuan Lee and Matt Yeh; “A Precise Resistor on a Semiconductor Device;” U.S. Appl. No. 12/770,166, filed Apr. 29, 2010; 34 Pages.

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