Plug and play sensor integration for a process module

Details Plug and play sensor integration for a process module Plug and play sensor integration for a process module

2008-04-08

2008-04-08

Wiley, David (Department: 2143)

Electrical computers and digital processing systems: multicomput

Computer network managing

Computer network monitoring

C709S224000

Reexamination Certificate

active

09539313

ABSTRACT:
A process chamber with a computer system that controls the process chamber is connected to one or more sensors, which are used to monitor the process in the process chamber. The sensors are connected to the computer system in a client/server relationship, in a way that allows the sensors to be hot swappable plug and play sensors. The computer system exchanges various messages with the sensors, synchronizes with the sensors, and integrates and utilizes data sent from the sensors.

REFERENCES:
patent: 4267572 (1981-05-01), Witte
patent: 4365303 (1982-12-01), Hannah et al.
patent: 4490806 (1984-12-01), Enke et al.
patent: 4645348 (1987-02-01), Dewar et al.
patent: 5301122 (1994-04-01), Halpern
patent: 5347460 (1994-09-01), Gifford et al.
patent: 5403621 (1995-04-01), Jackson et al.
patent: 5450205 (1995-09-01), Sawin et al.
patent: 5546322 (1996-08-01), Gifford et al.
patent: 5664066 (1997-09-01), Sun et al.
patent: 5715051 (1998-02-01), Luster
patent: 5757483 (1998-05-01), Pierce, III
patent: 5831851 (1998-11-01), Eastburn et al.
patent: 5937365 (1999-08-01), Friton et al.
patent: 5977913 (1999-11-01), Christ
patent: 6013108 (2000-01-01), Karolys et al.
patent: 6032109 (2000-02-01), Ritmiller, III
patent: 6077386 (2000-06-01), Smith, Jr. et al.
patent: 6090302 (2000-07-01), Smith, Jr. et al.
patent: 6091749 (2000-07-01), Hoffmaster et al.
patent: 6138241 (2000-10-01), Eckel et al.
patent: 6157867 (2000-12-01), Hwang et al.
patent: 6204768 (2001-03-01), Kosugi et al.
patent: 6225901 (2001-05-01), Kail, IV
patent: 6233492 (2001-05-01), Nakamura et al.
patent: 6243738 (2001-06-01), Hayles et al.
patent: 6265831 (2001-07-01), Howald et al.
patent: 6292108 (2001-09-01), Straser et al.
patent: 6360362 (2002-03-01), Fichtner et al.
patent: 6370454 (2002-04-01), Moore
patent: 6411994 (2002-06-01), van Allen et al.
patent: 6425006 (2002-07-01), Chari et al.
patent: 6446192 (2002-09-01), Narasimhan et al.
patent: 6493756 (2002-12-01), O'Brien et al.
patent: 6501377 (2002-12-01), Ebata et al.
patent: 6510350 (2003-01-01), Steen et al.
patent: 6515586 (2003-02-01), Wymore
patent: 6529236 (2003-03-01), Watanabe
patent: 6535123 (2003-03-01), Sandelman et al.
patent: 6553336 (2003-04-01), Johnson et al.
patent: 0552 873 (1993-07-01), None
patent: 0677737 (1995-10-01), None
patent: 2 692 701 (1993-12-01), None
patent: 99 08168 (1999-02-01), None
IEEE Standards Board, IEEE Standard for a Smart Transducer Interface for Sensors and Actuators-Transducer to Microprocessor Communication Protocols and Transducer Electronic Data Sheet (TEDS) Format, Sep. 16, 1997, The Institure of Electrical and Electronics Engineers, Inc., IEEE Std 1451.2-1997, 1-114.
International Search Report, date mailed Mar. 6, 2002.
U.S. Appl. No. 09/539,312, filed Mar. 30, 2000, entitled: “Integrated Full Wavelength Spectrometer for Wafer Processing”.
International Search Report, date mailed Apr. 19, 2002.
Kang B. Lee and Richard D. Schneeman, “Internet-Based Distributed Measurement and Control Applications”, IEEE Instrumentation & Measurement Magazine, Jun. 1999, p. 23-27.

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