Plug and play sensor integration for a process module

Details Plug and play sensor integration for a process module Plug and play sensor integration for a process module

2008-04-08

2008-04-08

Wiley, David (Department: 2143)

Electrical computers and digital processing systems: multicomput

Computer network managing

Computer network monitoring

C709S224000

Reexamination Certificate

active

07356580

ABSTRACT:
A process chamber with a computer system that controls the process chamber is connected to one or more sensors, which are used to monitor the process in the process chamber. The sensors are connected to the computer system in a client/server relationship, in a way that allows the sensors to be hot swappable plug and play sensors. The computer system exchanges various messages with the sensors, synchronizes with the sensors, and integrates and utilizes data sent from the sensors.

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